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General Purpose Thermal Mass Flow Controllers and Mass Flow Meters

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output

SLA5800 Series Elastomer Seal Mass Flow Controller & Mass Flow Meter

SLA5800 Series
Elastomer Seal
Mass Flow Controller
Mass Flow Meter
3 sccm - 2500 slpm 1% Rate or 0.7% Rate
0.2% FS
300 4500 65 150 0-5 Vdc, 4-20 mA, RS-485
DeviceNet™
FOUNDATION fieldbus™
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5800S Series Mass Flow Controller & Mass Flow Meter

5800S Series
Mass Flow Controller
Mass Flow Meter
3 sccm - 2500 slpm 0.7% Rate & 0.2% FS 300 4500 65 150 0-5 Vdc, 4-20 mA, RS-232/485
Profibus
FOUNDATION fieldbus™
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

4800 Series Mass Flow Controller & Mass Flow Meter

4800 Series
Mass Flow Controller
Mass Flow Meter
50 sccm - 40 slpm ±1% FS or
±3% FS
10 150 50 122 0-5 Vdc, 4-20 mA, RS-232/485
Profibus
Optional Local Operator Interface available for the 4800 Series.
Button-Data-Sheet-25Button-Request-A-Quote-25Button-Sales-Support-25Button-User-Manual-25
Click here to download the 4800 Series Software.

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output

5850EM Metal Seal Mass Flow Controller & Mass Flow Meter

5850EM
Metal Seal
Mass Flow Controller
Mass Flow Meter
3 sccm - 30 slpm 1% Rate 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

5851EM Metal Seal Mass Flow Controller & Mass Flow Meter

5851EM
Metal Seal
Mass Flow Controller
Mass Flow Meter
10 - 100 1% Rate 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

5850E Elastomer Seal Mass Flow Controller & Mass Flow Meter

5850E
Elastomer Seal
Mass Flow Controller
Mass Flow Meter
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

5851E Elastomer Seal Mass Flow Controller & Mass Flow Meter

5851E
Elastomer Seal
Mass Flow Controller
Mass Flow Meter
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

5853E Elastomer Seal Mass Flow Controller & Mass Flow Meter

5853E
Elastomer Seal
Mass Flow Controller
Mass Flow Meter
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

5860E Elastomer Seal Mass Flow Meter

5860E
Elastomer Seal
Mass Flow Meter
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

5861E Elastomer Seal Mass Flow Meter

5861E
Elastomer Seal
Mass Flow Meter
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc
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5863E Elastomer Seal Mass Flow Meter

5863E
Elastomer Seal
Mass Flow Meter
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

5850i Elastomer Seal Mass Flow Controller & Mass Flow Meter

5850i
Elastomer Seal
Mass Flow Controller
Mass Flow Meter
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

5851i Elastomer Seal Mass Flow Controller & Mass Flow Meter


5851i
Elastomer Seal
Mass Flow Controller
Mass Flow Meter
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

Elastomer Seal Mass Flow Controller & Mass Flow Meter

5853i
Elastomer Seal
Mass Flow Controller
Mass Flow Meter
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

Elastomer Seal Mass Flow Meter

5860i
Elastomer Seal
Mass Flow Meter
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

Elastomer Seal Mass Flow Meter

5861i
Elastomer Seal
Mass Flow Meter
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25
 

Elastomer Seal Mass Flow Meter

5863i
Elastomer Seal
Mass Flow Meter
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25Button-Request-A-Quote-25Button-Sales-Support-25

 

Brooks instruments Vietnam - STC Vietnam