Flow Meters & Flow Controllers for General Purpose - Brooks instruments Vietnam - STC Vietnam

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				Max Pressure		Max Temp
Model	Type	Full Scale Capacity	Accuracy	bar	psig	C	F	Input/Output
SLA5800 Series	Elastomer Seal Mass Flow Controller Mass Flow Meter	3 sccm - 2500 slpm	1% Rate or 0.7% Rate 0.2% FS	300	4500	65	150	0-5 Vdc, 4-20 mA, RS-485 DeviceNet™ FOUNDATION fieldbus™

5800S Series	Mass Flow Controller Mass Flow Meter	3 sccm - 2500 slpm	0.7% Rate & 0.2% FS	300	4500	65	150	0-5 Vdc, 4-20 mA, RS-232/485 Profibus FOUNDATION fieldbus™

4800 Series	Mass Flow Controller Mass Flow Meter	50 sccm - 40 slpm	±1% FS or ±3% FS	10	150	50	122	0-5 Vdc, 4-20 mA, RS-232/485 Profibus
Optional Local Operator Interface available for the 4800 Series. Click here to download the 4800 Series Software.

				Max Pressure		Max Temp
Model	Type	Full Scale Capacity	Accuracy	bar	psig	C	F	Input/Output
5850EM	Metal Seal Mass Flow Controller Mass Flow Meter	3 sccm - 30 slpm	1% Rate	100	1500	65	150	0-5 Vdc

5851EM	Metal Seal Mass Flow Controller Mass Flow Meter	10 - 100	1% Rate	100	1500	65	150	0-5 Vdc

5850E	Elastomer Seal Mass Flow Controller Mass Flow Meter	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc

5851E	Elastomer Seal Mass Flow Controller Mass Flow Meter	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc

5853E	Elastomer Seal Mass Flow Controller Mass Flow Meter	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc

5860E	Elastomer Seal Mass Flow Meter	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc

5861E	Elastomer Seal Mass Flow Meter	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc

5863E	Elastomer Seal Mass Flow Meter	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc

5850i	Elastomer Seal Mass Flow Controller Mass Flow Meter	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA

5851i	Elastomer Seal Mass Flow Controller Mass Flow Meter	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA

5853i	Elastomer Seal Mass Flow Controller Mass Flow Meter	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA

5860i	Elastomer Seal Mass Flow Meter	3 sccm - 30 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA

5861i	Elastomer Seal Mass Flow Meter	10 - 100 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA

5863i	Elastomer Seal Mass Flow Meter	100 - 1000 slpm	1% FS	100	1500	65	150	0-5 Vdc, 4-20 mA